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Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD

Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD

저자

Dai-Hong Kim, Ji-HwanKwon, Miyoung Kim, Seong-Hyeon Hong

저널 정보

Journal of Crystal Growth

출간연도

2011

Dai-Hong Kim, Ji-HwanKwon, Miyoung Kim, Seong-Hyeon Hong, “Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD”, Journal of Crystal Growth 322 33–37 (2011)