Ethanol sensors based on ZnO nanotubes with controllable wall thickness via atomic layer deposition, an O2 plasma process and an annealing process

Home Ethanol sensors based on ZnO nanotubes with controllable wall thickness via atomic layer deposition, an O2 plasma process and an annealing process

Ethanol sensors based on ZnO nanotubes with controllable wall thickness via atomic layer deposition, an O2 plasma process and an annealing process

저자

Sungkwon Cho, Dai-Hong Kim, Byoung-Sun Lee, Joohyun Jung, Woong-Ryeol Yu, Seong-Hyeon Hong and Seonghoon Lee

저널 정보

Sensors and Actuators B

출간연도

2012

링크

https://doi.org/10.1016/j.snb.2011.12.081

Sungkwon Cho, Dai-Hong Kim, Byoung-Sun Lee, Joohyun Jung, Woong-Ryeol Yu, Seong-Hyeon Hong and Seonghoon Lee, “Ethanol sensors based on ZnO nanotubes with controllable wall thickness via atomic layer deposition, an O2 plasma process and an annealing process”, Sensors and Actuators B 162 (2012) 300–306

Advanced Materials Processing Laboratory신소재 공정 연구실

Ethanol sensors based on ZnO nanotubes with controllable wall thickness via atomic layer deposition, an O2 plasma process and an annealing process

Ethanol sensors based on ZnO nanotubes with controllable wall thickness via atomic layer deposition, an O2 plasma process and an annealing process

Advanced Materials Processing Laboratory