Home Epitaxial growth of orthorhombic SnO2 films on various YSZ substrates by plasma enhanced atomic layer deposition
저자
Sungtae Kim, Dai-Hong Kim, Seong-Hyeon Hong
저널 정보
Journal of Crystal Growth
출간연도
2012
링크
https://doi.org/10.1016/j.jcrysgro.2012.03.047
Sungtae Kim, Dai-Hong Kim, Seong-Hyeon Hong, “Epitaxial growth of orthorhombic SnO2 films on various YSZ substrates by plasma enhanced atomic layer deposition”, Journal of Crystal Growth, 148 (1) 15-19 (2012)