Jae Bin Lee, Hyeong Joon Kim, Soo Gil Kim, Cheol Seong Hwang, Seong-Hyeon Hong, Young Hwa Shin and Neung Hun Lee , “Deposition of ZnO thin films by magnetron sputtering for a film bulk acoustic resonator”, Thin Solid Films, Volume 435, Issues 1-2, 1 July 2003, Pages 179-185