Hun Shim, Young-Jo Park, Seong-Hyeon Hong* (2025). B4C and WC as viable alternatives to SiC for plasma-facing components in semiconductor manufacturing. Appl. Surf. Sci., 696, 162960.
저자
Hun Shim, Young-Jo Park, Seong-Hyeon Hong*
저널 정보
Applied Surface Science
출간연도
2025
Hun Shim, Young-Jo Park, Seong-Hyeon Hong* (2025). B4C and WC as viable alternatives to SiC for plasma-facing components in semiconductor manufacturing. Appl. Surf. Sci., 696, 162960.